An introduction to terahertz time-domain spectroscopic ellipsometry

In the past, terahertz spectroscopy has mainly been performed based on time-domain systems in a transmission or window/prism-supported reflection configuration. These conventional approaches have limitations regard to characterizing opaque solids, conductive thin films, multiple-layer structures, and anisotropic materials. Ellipsometry is self-reference characterization technique with wide adaptability that can be applied for nearly all sample types. However, ellipsometry not yet widely applied, due critical requirement it places optical setting large discrepancy traditional ellipsometry. this Tutorial, we introduce spectroscopic from basic concept, theory, configuration, error calibration methods. Experimental results silicon wafers of different resistivities are presented as examples. This Tutorial provides key technical guidance skills accurate